JPH0453055U - - Google Patents
Info
- Publication number
- JPH0453055U JPH0453055U JP9350890U JP9350890U JPH0453055U JP H0453055 U JPH0453055 U JP H0453055U JP 9350890 U JP9350890 U JP 9350890U JP 9350890 U JP9350890 U JP 9350890U JP H0453055 U JPH0453055 U JP H0453055U
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- ring
- vacuum chamber
- planetary
- driving wheel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9350890U JPH0453055U (en]) | 1990-09-07 | 1990-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9350890U JPH0453055U (en]) | 1990-09-07 | 1990-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453055U true JPH0453055U (en]) | 1992-05-06 |
Family
ID=31830787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9350890U Pending JPH0453055U (en]) | 1990-09-07 | 1990-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453055U (en]) |
-
1990
- 1990-09-07 JP JP9350890U patent/JPH0453055U/ja active Pending